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Englishn this paper we describe a low substrate temperature CdTe fabrication process by vacuum evaporation (VE) where the recrystallization step avoids the use of CdCl2, which is a carcinogenic material. In our process CdS and CdTe are deposited at pressures of 10−6 mbar in the same chamber by thermal evaporation and with substrate temperature of 150 °C and 340 °C, respectively. The CdTe/CdS/TCO stacks are then put in a quartz chamber and, after having previously pumped the chamber down to 10−5 mbar, a controlled mixture of argon and chlorine containing gas is fluxed with a substrate temperature in a range between 400 °C and 450 °C. The morphological properties of the single layers are studied by X-ray diffraction (XRD), atomic force microscopy (AFM), cathodo-luminescence (CL) and the electrical properties of the finished devices are presented by means of current–voltage (I–V) and capacitance–voltage (C–V) measurements.
| Titolo: | Study of difluorochloromethane activation treatment on low substrate temperature deposited CdTe solar cells | |
| Autori: | ||
| Data di pubblicazione: | 2013 | |
| Rivista: | ||
| Abstract: | n this paper we describe a low substrate temperature CdTe fabrication process by vacuum evaporation (VE) where the recrystallization step avoids the use of CdCl2, which is a carcinogenic material. In our process CdS and CdTe are deposited at pressures of 10−6 mbar in the same chamber by thermal evaporation and with substrate temperature of 150 °C and 340 °C, respectively. The CdTe/CdS/TCO stacks are then put in a quartz chamber and, after having previously pumped the chamber down to 10−5 mbar, a controlled mixture of argon and chlorine containing gas is fluxed with a substrate temperature in a range between 400 °C and 450 °C. The morphological properties of the single layers are studied by X-ray diffraction (XRD), atomic force microscopy (AFM), cathodo-luminescence (CL) and the electrical properties of the finished devices are presented by means of current–voltage (I–V) and capacitance–voltage (C–V) measurements. | |
| Handle: | http://hdl.handle.net/11562/550549 | |
| Appare nelle tipologie: | 01.01 Articolo in Rivista |
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