Slot and sandwiched waveguides with silicon nanocrystals were fabricated by means of industrial microelectronic tools, including DUV lithography. Low loss of 4 dB/cm will pave the way to compact all-optical XOR logic gates.

Deep-UV lithography fabrication of slot waveguides and sandwiched waveguides for nonlinear applications

Daldosso, Nicola;
2007

Abstract

Slot and sandwiched waveguides with silicon nanocrystals were fabricated by means of industrial microelectronic tools, including DUV lithography. Low loss of 4 dB/cm will pave the way to compact all-optical XOR logic gates.
Slot waveguides; fabrication; nonlinear properties
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11562/477088
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