Slot and sandwiched waveguides with silicon nanocrystals were fabricated by means of industrial microelectronic tools, including DUV lithography. Low loss of 4 dB/cm will pave the way to compact all-optical XOR logic gates.
Deep-UV lithography fabrication of slot waveguides and sandwiched waveguides for nonlinear applications
Daldosso, Nicola;
2007-01-01
Abstract
Slot and sandwiched waveguides with silicon nanocrystals were fabricated by means of industrial microelectronic tools, including DUV lithography. Low loss of 4 dB/cm will pave the way to compact all-optical XOR logic gates.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.