Slot and sandwiched waveguides with silicon nanocrystals were fabricated by means of industrial microelectronic tools, including DUV lithography. Low loss of 4 dB/cm will pave the way to compact all-optical XOR logic gates.
Titolo: | Deep-UV lithography fabrication of slot waveguides and sandwiched waveguides for nonlinear applications | |
Autori: | ||
Data di pubblicazione: | 2007 | |
Rivista: | ||
Abstract: | Slot and sandwiched waveguides with silicon nanocrystals were fabricated by means of industrial microelectronic tools, including DUV lithography. Low loss of 4 dB/cm will pave the way to compact all-optical XOR logic gates. | |
Handle: | http://hdl.handle.net/11562/477088 | |
Appare nelle tipologie: | 01.01 Articolo in Rivista |
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