Lead-silicate glassy thin films have been obtained by means of RF Magnetron Sputtering under different plasma gas mixtures and using different sputtering targets, The resulting coatings composition, microstructure and their optical and electrical properties have been studied by means of several experimental techniques, i.e.: nuclear analysis, Raman spectroscopy, ellipsometry and DC electrical conductivity.
Physical properties of lead-silicate glassy thin films deposited by sputtering in Ar:H-2 mixtures
MARIOTTO, Gino;
1996-01-01
Abstract
Lead-silicate glassy thin films have been obtained by means of RF Magnetron Sputtering under different plasma gas mixtures and using different sputtering targets, The resulting coatings composition, microstructure and their optical and electrical properties have been studied by means of several experimental techniques, i.e.: nuclear analysis, Raman spectroscopy, ellipsometry and DC electrical conductivity.
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