Hard amorphous hydrogenated carbon films (350 nm thick) deposited by self-bias glow discharge were implanted at room temperature with 70 keV nitrogen ions at fluences of 0.6, 1.0 and 2.0 X 10(17) N/cm(2). The implanted energy was chosen so that the projected range plus straggling (R(p) + Delta R(p)) was smaller than the film thickness. The implanted samples were analyzed by Auger electron spectroscopy, X-ray photoelectron spectroscopy and micro-Raman spectroscopy. Factor analysis was applied to the crater-edge Auger profile. For micro-Raman depth profiles, a well focused argon laser beam was scanned across the wall of the same crater produced by 2 keV Ar+ bombardment for the AES measurements. XPS depth profiles were also obtained. The Auger and Raman results indicated that the structural modifications (increase of the relative amount of carbon sp(2)-bonds) are related to the energy deposited by the incident ion and depend on the ion fluence. Nitrogen incorporation into the amorphous carbon network can be inferred from XPS results.

NITROGEN IMPLANTATION INTO AMORPHOUS-CARBON FILMS - XPS, AES AND RAMAN ANALYSES

MARIOTTO, Gino
1995

Abstract

Hard amorphous hydrogenated carbon films (350 nm thick) deposited by self-bias glow discharge were implanted at room temperature with 70 keV nitrogen ions at fluences of 0.6, 1.0 and 2.0 X 10(17) N/cm(2). The implanted energy was chosen so that the projected range plus straggling (R(p) + Delta R(p)) was smaller than the film thickness. The implanted samples were analyzed by Auger electron spectroscopy, X-ray photoelectron spectroscopy and micro-Raman spectroscopy. Factor analysis was applied to the crater-edge Auger profile. For micro-Raman depth profiles, a well focused argon laser beam was scanned across the wall of the same crater produced by 2 keV Ar+ bombardment for the AES measurements. XPS depth profiles were also obtained. The Auger and Raman results indicated that the structural modifications (increase of the relative amount of carbon sp(2)-bonds) are related to the energy deposited by the incident ion and depend on the ion fluence. Nitrogen incorporation into the amorphous carbon network can be inferred from XPS results.
AMORPHOUS-CARBON FILMS, NITROGEN IMPLANTATION, XPS, AES, RAMAN SPECTROSCOPY
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11562/434985
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus ND
  • ???jsp.display-item.citation.isi??? ND
social impact