Hard amorphous hydrogenated carbon films (350 nm thick) deposited by self-bias glow discharge were implanted at room temperature with 70 keV nitrogen ions at fluences of 0.6, 1.0 and 2.0 X 10(17) N/cm(2). The implanted energy was chosen so that the projected range plus straggling (R(p) + Delta R(p)) was smaller than the film thickness. The implanted samples were analyzed by Auger electron spectroscopy, X-ray photoelectron spectroscopy and micro-Raman spectroscopy. Factor analysis was applied to the crater-edge Auger profile. For micro-Raman depth profiles, a well focused argon laser beam was scanned across the wall of the same crater produced by 2 keV Ar+ bombardment for the AES measurements. XPS depth profiles were also obtained. The Auger and Raman results indicated that the structural modifications (increase of the relative amount of carbon sp(2)-bonds) are related to the energy deposited by the incident ion and depend on the ion fluence. Nitrogen incorporation into the amorphous carbon network can be inferred from XPS results.
NITROGEN IMPLANTATION INTO AMORPHOUS-CARBON FILMS - XPS, AES AND RAMAN ANALYSES
MARIOTTO, Gino
1995-01-01
Abstract
Hard amorphous hydrogenated carbon films (350 nm thick) deposited by self-bias glow discharge were implanted at room temperature with 70 keV nitrogen ions at fluences of 0.6, 1.0 and 2.0 X 10(17) N/cm(2). The implanted energy was chosen so that the projected range plus straggling (R(p) + Delta R(p)) was smaller than the film thickness. The implanted samples were analyzed by Auger electron spectroscopy, X-ray photoelectron spectroscopy and micro-Raman spectroscopy. Factor analysis was applied to the crater-edge Auger profile. For micro-Raman depth profiles, a well focused argon laser beam was scanned across the wall of the same crater produced by 2 keV Ar+ bombardment for the AES measurements. XPS depth profiles were also obtained. The Auger and Raman results indicated that the structural modifications (increase of the relative amount of carbon sp(2)-bonds) are related to the energy deposited by the incident ion and depend on the ion fluence. Nitrogen incorporation into the amorphous carbon network can be inferred from XPS results.
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