Hard amorphous hydrogenated carbon films (350 nm thick) deposited by self-bias glow discharge were implanted at room temperature with 70 keV nitrogen ions at fluences of 0.6, 1.0 and 2.0 X 10(17) N/cm(2). The implanted energy was chosen so that the projected range plus straggling (R(p) + Delta R(p)) was smaller than the film thickness. The implanted samples were analyzed by Auger electron spectroscopy, X-ray photoelectron spectroscopy and micro-Raman spectroscopy. Factor analysis was applied to the crater-edge Auger profile. For micro-Raman depth profiles, a well focused argon laser beam was scanned across the wall of the same crater produced by 2 keV Ar+ bombardment for the AES measurements. XPS depth profiles were also obtained. The Auger and Raman results indicated that the structural modifications (increase of the relative amount of carbon sp(2)-bonds) are related to the energy deposited by the incident ion and depend on the ion fluence. Nitrogen incorporation into the amorphous carbon network can be inferred from XPS results.
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