We report on the fabrication and characterization of planar waveguides in an Er-doped tungsten-tellurite glass by implantation of 3.5 MeV N + ions. Implantations were carried out in a wide fluence range of 1 · 10 16 8 · 10 16 ions/cm 2. Waveguides were characterized by m-line spectroscopy and spectroscopic ellipsometry. Irradiation-induced refractive index modulation saturated around a fluence of 8 · 10 16 ions/cm 2. Waveguides operating at 1550 nm were obtained in that material using 3.5 MeV N + ion implantation. © 2012 IEEE.
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