Complementary metal-oxide-semiconductor-compatible tunable Fabry-Perot microcavities filled with liquid crystals (LCs) were realized and studied in the near-infrared region. The microcavities were produced by chip bonding technique, which allows one to infill LC between two [SiO(2)/Si](3)lambda/4 (lambda=1.5 mum) dielectric Bragg reflectors separated by 950-nm-thick SiO(2) posts. Liquid crystals with positive and negative dielectric anisotropy were used, i.e. MerckE7 (Deltaepsilon=13.8) and Merck-6608 LC (Deltaepsilon=-4.2). Mirror-integrated electrodes allow an external bias to induce an electric field and to tune the LC properties and, hence, the microcavity resonance. Electric-field-induced shifts of the second-order cavity modes of 127 and 49 nm were obtained for Merck-E7 and Merck-6608 LC, with driving potentials of 5 and 10 V, respectively.
Silicon-based near-infrared tunable filters filled with positive or negative dielectric anisotropic liquid crystals
Daldosso, Nicola;
2004-01-01
Abstract
Complementary metal-oxide-semiconductor-compatible tunable Fabry-Perot microcavities filled with liquid crystals (LCs) were realized and studied in the near-infrared region. The microcavities were produced by chip bonding technique, which allows one to infill LC between two [SiO(2)/Si](3)lambda/4 (lambda=1.5 mum) dielectric Bragg reflectors separated by 950-nm-thick SiO(2) posts. Liquid crystals with positive and negative dielectric anisotropy were used, i.e. MerckE7 (Deltaepsilon=13.8) and Merck-6608 LC (Deltaepsilon=-4.2). Mirror-integrated electrodes allow an external bias to induce an electric field and to tune the LC properties and, hence, the microcavity resonance. Electric-field-induced shifts of the second-order cavity modes of 127 and 49 nm were obtained for Merck-E7 and Merck-6608 LC, with driving potentials of 5 and 10 V, respectively.
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