SbxSey thin-films were obtained by chemical-molecular beam deposition (CMBD) on soda-lime glass from Sb and Se precursors. By the precise control of the Sb/Se ratio, Sb2Se3 thin films with stoichiometric composition were successfully obtained. The elemental and phase composition, as well as the crystal structure of SbxSey thin-films, were studied by energy-dispersive X-ray microanalysis, X-ray diffraction, Raman spectroscopy, scanning electron microscopy and atomic force microscopy. The optical bandgap of the films was determined from the absorption spectra acquired by a spectrophotometer. The physical properties of SbxSey thin films with different compositions were investigated.
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