Channel waveguides were directly written in Er: TeO2W2O3 glass using 11 MeV C4+ ion microbeam with fluences in the range of 1·1014–5·1016 ion/cm2. The channel waveguides supported a single guided mode at λ = 1540 nm. Propagation losses of the as-irradiated channel waveguides were around 14 dB/cm. A 30-min thermal annealing at 150 °C in air reduced propagation losses at λ = 1400 nm to 1.5 dB/cm. This method produced channel waveguides with confinement and propagation losses comparable to or better than other current methods, such as MeV energy focused proton or helium ion beam writing.
Fabrication of low loss channel waveguide in tungsten-tellurite glass by 11 MeV carbon ion microbeam for telecom C band
Speghini, A.
2019-01-01
Abstract
Channel waveguides were directly written in Er: TeO2W2O3 glass using 11 MeV C4+ ion microbeam with fluences in the range of 1·1014–5·1016 ion/cm2. The channel waveguides supported a single guided mode at λ = 1540 nm. Propagation losses of the as-irradiated channel waveguides were around 14 dB/cm. A 30-min thermal annealing at 150 °C in air reduced propagation losses at λ = 1400 nm to 1.5 dB/cm. This method produced channel waveguides with confinement and propagation losses comparable to or better than other current methods, such as MeV energy focused proton or helium ion beam writing.
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