Associated to silicon nanocrystals, slot waveguides are promising components for the fabrication of fast optical switches. We report here on the fabrication of slot waveguides with industrial microelectronic tools, especially DUV lithography. The filling of slot waveguides with silicon nanocrystals within SiO2 by PECVD and LPCVD deposition results in almost filled waveguides owing to incorrect silicon etching profiles. We also report on slot waveguide alternative structure: the sandwiched waveguide. This structure eliminates the slot filling step and allows slot thickness as thin as desired. The association of silicon nanocrystals and slot waveguides, if used in a Mach-Zender Interferometer structure, will pave the way to the first compact alloptical XOR logic gate entirely fabricated with CMOS tools.
Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications
Daldosso, Nicola;
2007-01-01
Abstract
Associated to silicon nanocrystals, slot waveguides are promising components for the fabrication of fast optical switches. We report here on the fabrication of slot waveguides with industrial microelectronic tools, especially DUV lithography. The filling of slot waveguides with silicon nanocrystals within SiO2 by PECVD and LPCVD deposition results in almost filled waveguides owing to incorrect silicon etching profiles. We also report on slot waveguide alternative structure: the sandwiched waveguide. This structure eliminates the slot filling step and allows slot thickness as thin as desired. The association of silicon nanocrystals and slot waveguides, if used in a Mach-Zender Interferometer structure, will pave the way to the first compact alloptical XOR logic gate entirely fabricated with CMOS tools.
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